SEMI-S2 Semiconductor Process Equipment Safety Guidelines is a guiding and normative safety standard in this field. It not only ensures the safe operation of semiconductor process equipment, but also provides systematic guidelines for environmental protection and hygiene throughout the chip manufacturing process. The formulation of the SEMI-S2 standard is based on various risks that may be encountered during the design, use and maintenance of semiconductor manufacturing equipment. Therefore, the standard covers an extremely wide range, from general safety management guidelines to specific safety technical requirements, to emergency response measures, all of which are clearly specified.